Vacuum Feedthroughs, Heating Elements, and Custom Thermal Systems for
Aerospace, University Research, Semiconductor, Medical and OEM Applications

Liquid and Gas Vacuum Feedthroughs

Multi and Single Tube Feedthrough

Need to Pass Multiple Fluids or Gases Through a Vacuum Wall? Get BCE Custom Multi or Singular Tube Feedthroughs

Multi tube feedthroughs are used to deliver several fluids or gases in to vacuum systems. They are designed for a variety of vacuum applications where a compact, single connection is needed. Custom materials and configurations are easily accommodated.

Delivering gases and liquids to vacuum rated devices and components to energize their main feature, or to maintain temperature, may be a daunting task. Welded or sealed flanges and baseplate ports to tubes are usually terminated with vacuum rated fittings. When using multi-tube feedthroughs, a combination of diameters may not fit in the flanges’ interference area causing the overall dimensions to exceed the chamber’s port bore.

Specifications

  • Designed for delivery of liquids and/or gas.
  • Maximum bake-out temperature: 150°C (BCE Epoxy Based)
  • Maximum bake-out temperature ceramic-to-metal based: 450°C
  • Multiple material and component options available.
  • Outgassing: meets NASA ASTM E595 (BCE Epoxy Based)
  • Total Mass Loss (TML): <1.0%. (BCE Epoxy Based)
  • Collected Volatile Condensable Materials: <0.1% (BCE Epoxy Based)
  • UHV welded
  • Extended thermal paths
  • Vacuum-side Terminations: Swagelok®, Tube Ends, Male VCR®/VCO, Female VCR/VCO
  • Air-side Terminations: Swagelok®, Tube Ends, Male VCR®/VCO, Female VCR/VCO  

Knowledge of the total quantity, diameter, and temperature of the tubing near the flange can have an effect on product recommendation. For example, would this be a High Temperature Feedthrough or Low Temperature BCE Epoxy base Feedthrough. Another consideration with Gas and liquid feedthroughs is that they may have internal devices that are not grounded requiring electrical isolation.

When using cryogenic vacuum feedthroughs note that they will have a long thermal path, or thermal break, for the distance between the flange and the tube extending into the chamber. Use of thin gauge tubing made of a stainless material should result in a reduction of the transfer of heat thus reducing the cryogenic evaporation rate.

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