Vacuum Feedthroughs, Heating Elements, and Custom Thermal Systems for
Aerospace, University Research, Semiconductor, Medical and OEM Applications

HOT CHUCK HEATER 300mm: AL 6061 T6 WITH MIRROR SURFACE FINISH

HOT CHUCK HEATER

BACKGROUND

A BCE customer needed to replace a cast aluminum heater that had surface finish challenges and extremely long lead-times. A vacuum brazed-in 6061 T6 aluminum heater with a 2-3 Ra μin surface finish was the answer.

Download Case Study (PDF)


SCOPE

HOT CHUCK HEATER 300mm needed to satisfy the following criteria:

  • Temperature uniformity +/- 1%
  • 50°C - 450°C Temperature range
  • Surface finish of 2-3 Ra μin
  • Hard coat Anodize
  • 6061 T6 Aluminum
  • Be able to heat ceramic top plate
  • 20 Meg-ohm isolation at 1000 VDC
  • Hi-pot 2E + 1K at 3 mA

OUTCOME

BCE designed a unit using proprietary internal element patterns, notches, and thermocouple holes, as well as adding additional manufacturing steps to provide the 2-3 Ra μin finish. Vacuum integrity for the customer has been greatly increased as well as contact with the ceramic workpiece and temperature uniformity.

Drawing


BCE Engineering & Quality Assurance

BCE engineers provide decades of experience in design and development, delivering a wealth of empirical data and experience. BCE welcomes your custom requirement and will design and deliver a part that meets your challenging needs.

BCE is recognized for its commitment to quality and excellence by being certified in accordance with ISO 9001:2015.
ISO 9001

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