HOT CHUCK HEATER 300mm: AL 6061 T6 WITH MIRROR SURFACE FINISH
A BCE customer needed to replace a cast aluminum heater that had surface finish challenges and extremely long lead-times. A vacuum brazed-in 6061 T6 aluminum heater with a 2-3 Ra μin surface finish was the answer.
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HOT CHUCK HEATER 300mm needed to satisfy the following criteria:
- Temperature uniformity +/- 1%
- 50°C - 450°C Temperature range
- Surface finish of 2-3 Ra μin
- Hard coat Anodize
- 6061 T6 Aluminum
- Be able to heat ceramic top plate
- 20 Meg-ohm isolation at 1000 VDC
- Hi-pot 2E + 1K at 3 mA
BCE designed a unit using proprietary internal element patterns, notches, and thermocouple holes, as well as adding additional manufacturing steps to provide the 2-3 Ra μin finish. Vacuum integrity for the customer has been greatly increased as well as contact with the ceramic workpiece and temperature uniformity.
BCE Engineering & Quality Assurance
BCE engineers provide decades of experience in design and development, delivering a wealth of empirical data and experience. BCE welcomes your custom requirement and will design and deliver a part that meets your challenging needs.
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