Vacuum Feedthroughs, Heating Elements, and Custom Thermal Systems for
Aerospace, University Research, Semiconductor, Medical and OEM Applications

Semiconductor Heaters

Semiconductor Heaters

Electric Heaters and Assemblies for the Semiconductor Wafer Manufacturing Process

Electric heaters that provide a very high level of temperature uniformity across the semiconductor wafer to ensure consistent quality plus highly repeatable and efficient wafer processing.

The BCE Advantage

  • Engineering Support for New Designs
  • Rapid Prototyping
  • Proprietary internal element patterns.
  • Expertise in semiconductor process heating.
Clamped-In Coil Heater

Clamped-In Coil Heater

Provides excellent temperature uniformity at lower cost.

Hot Chuck Heater 300mm

Hot Chuck Heater 300mm

A vacuum brazed-in 6061 T6 aluminum heater with a 2-3 Ra µin surface finish.

Vacuum Ring Heater

Vacuum Ring Heater

Provides uniform heat in vacuum chambers.

Thermowell Vacuum Assembly

Vacuum Thermowell & Heater Assembly

Simultaneously Heat and Monitor Wafer Temperatures

Heater & Thermocouple Feedthrough Assemblies

Heater & Thermocouple Feedthrough Assemblies

Breaking barriers in high vacuum applications.

SuperCirc Clean Gas Heater

Kapton Etched Foil Heater

Fast Responding, low profile, low outgassing.

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