21060 Corsair Blvd. Hayward, CA 94545

Vacuum Feedthroughs, Heating Elements, and Custom Thermal Systems for
Aerospace, University Research, Semiconductor, Medical and OEM Applications

Semiconductor Heaters

Semiconductor Heaters

Electric Heaters and Assemblies for the Semiconductor Wafer Manufacturing Process

Industrial process tools used for memory devices, transistors, crystal silicon, microprocessors, photovoltaic (PV) cells, and thin film PV cells. All these applications required a shrewd knowledge of temperature, BCE continues to innovate and provide customer specific thermal solutions that are critical to next generation equipment and processes.

Resistive heaters that provide a very high level of temperature uniformity across the semiconductor wafer to ensure consistent quality plus highly repeatable and efficient wafer processing. Aluminum 6061-T6 heaters are vacuum brazed with operating temperatures up to 450°C, temperature uniformity of +/-1%, and can have a 2-3Ra µin surface finish. The heaters can be tested for up to 100 m-ohm Isolation at 1000VDC and Hi-pot of 2E+1,000 or greater at 1-3mA.

Stainless steel and Inconel heater plates/chucks can reach temperatures of up to 800°C with ceramic thermal breaks in between the flange and the base plate. These heater plates are generally welded with three mating plugs for compression and have an outside weld on the edge. They can be built with grounded internal thermocouples for a quick response to the resistance wire for ramping and high temperature monitoring. This ensures that over-temperature circuit breaks can be minimized while maintaining the quickest reaction time in scaling down a fast ramp rate.

Stainless steel and Inconel heater plates/chucks can reach temperatures of up to 800°C with ceramic thermal breaks in between the flange and the base plate. These heater plates are generally welded with three mating plugs for compression and have an outside weld on the edge. They can be built with grounded internal thermocouples for a quick response to the resistance wire for ramping and high temperature monitoring. This ensures that over-temperature circuit breaks can be minimized while maintaining the quickest reaction time in scaling down a fast ramp rate.

The BCE Advantage

  • Engineering support for new and existing designs
  • Rapid prototyping and machine parts
  • Quick responses on inquiries and quotations
  • Proprietary internal element patterns
  • Expertise in semiconductor process heating and sensing based in Silicon Valley
  • Flatness and temperature uniformity engineering
  • Dielectric, temperature, and m-Ohm testing onsite with Certs of Conformance
  • Vacuum feedthrough design on all sensors, heaters, and atmospheric connections
  • Bench testing on new and existing designs  

Heater Designs for Semiconductor Processing

  • Immersion heaters using 316 Stainless Steel Sheath
  • Alumina heaters
  • Pedestal heaters in Aluminum, Stainless, and Inconel
  • Bake/Chill Platens
  • Vacuum Ring Heaters
  • Bake/Chill Pedestals
  • Brazed-in 76mm to 300mm Heater Chucks
  • Clamp-in Coil Heaters 
Clamped-In Coil Heater

Clamped-In Coil Heater

Provides excellent temperature uniformity at lower cost.

Hot Chuck Heater 300mm

Hot Chuck Heater 300mm

A vacuum brazed-in 6061 T6 aluminum heater with a 2-3 Ra µin surface finish.

Vacuum Ring Heater

Vacuum Ring Heater

Provides uniform heat in vacuum chambers.

Thermowell Vacuum Assembly

Vacuum Thermowell & Heater Assembly

Simultaneously Heat and Monitor Wafer Temperatures

Heater & Thermocouple Feedthrough Assemblies

Heater & Thermocouple Feedthrough Assemblies

Breaking barriers in high vacuum applications.

SuperCirc Clean Gas Heater

Kapton Etched Foil Heater

Fast Responding, low profile, low outgassing.

Hight Temp Chuck Heater

High Temp Heater Chuck

Exceptional uniformity, vacuum integrity, temperature stability.

 

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21060 Corsair Blvd. Hayward, CA 94545 | (510) 274-1990
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