Vacuum Feedthroughs, Heating Elements, and Custom Thermal Systems for
Aerospace, University Research, Semiconductor, Medical and OEM Applications

Twin Type-C Thermocouple Vacuum Feedthrough

Twin Type-C Thermocouple Vacuum Feedthrough

High Temperature, High Vacuum Twin-C Thermocouple Feedthrough

Designed for the semiconductor equipment industry where for a high temperature, high vacuum multi-point thermocouple (TC) is required with limited space a very small insertion dimension.

Specifications

  • Up to 1425°C continuous operating temperature in probe area.
  • Two independent type “C” thermocouple probes.
  • KF16 Flange.
  • Vacuum rating: 10-9 ATM-CC/Sec.
  • Feedthrough Seal Temp: -25°C to 300°C.
  • Probe section needs to be bendable and vacuum compatible with SEMI standard.
  • ALL TESTS PERFORMED AT ROOM TEMPERATURE

Drawing


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