An application was presented to BCE in the semiconductor equipment industry for a high temperature, high vacuum thermocouple (TC). There was space limitation with a requirement for a multi-point TC to sense a very small insertion dimension. The TC probe area must be able to bend to allow the sensor tip to penetrate the temperature sensing zone. The BCE engineers and technicians were ready for the challenge with their experience in ceramic-to-metal sealing and high temp sensors.
BCE designed an effective High Temperature Vacuum TC that was delivered for prototyping and customer testing. The application requirement was met and the function was sound. All tests performed prior to shipping were completed at BCE. A standard operating procedure (SOP) was finished and the part is production ready.
