ALD Vacuum Chamber Pedestal Heater – Extended Sleeve
BACKGROUND
A BCE customer needed a heating solution for an ALD Vacuum Chamber Heater testing 6” (152mm) wafers up to 450ºC. There were obvious space constraints at the customer site requiring an extended sleeve of 25”. The extra-long length enabled the placement of the wafer on the top surface eliminating the need to modify the existing chamber.
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SCOPE
The Vacuum Pedestal Heater - Extended Sleeve needed to satisfy the following:
- Temperature 450ºC
- 25” Long sleeve with 2.75 CF Flange on the bottom
- Body must pass Helium Leak rate of 1 x 10-9 cc/sec He
- 6” overall diameter for 6” (152mm) wafers
- Top surface must have a flatness of ± .005”
- Thermocouple for additional temperature measurement
- 1,000 Watt (± 10%) , 120 Volt
- Material was 304 Stainless Steel
OUTCOME
The Vacuum Pedestal Heater was ramped in atmosphere to 450ºC in approximately 45 minutes. Due to the 360º weld, there was some deflection on the top surface causing it to be out of tolerance. After the 450ºC ramp, the Vacuum Pedestal Heater was polished down to below ± .005”. A leak test was performed to spec and cleaned to high purity standards then shipped in clean room bags.
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