Vacuum Feedthroughs, Heating Elements, and Custom Process Heaters for Semiconductor, OEM Applications and University Research

300mm Vacuum Heater Pedestal

300mm Vacuum Heater Pedestal product

Overview

Vacuum Heater Pedestal for the manufacturing of 300mm silicon wafers. Temperature needed to be ~650°C in vacuum, 304 stainless steel material with a 2.75 CF Flange at the bottom. Three small top surface steps for lifting the wafers and a tri-pin placement location to keep the wafer from slipping off the heater.

Download Temp Uniformity Test Results (PDF)

Features

  • Temperature 650°C-700°C
  • CF 2.75 Vacuum Flange on the bottom, pedestal style
  • Helium Leak rate of 1 x 10-9 cc/sec He on complete assembly
  • Thermal break between the top of the heater and the CF flange
  • Thermocouple built-in for over-temp protection or control un-grounded
  • An additional TC for bottom temperature read un-grounded
  • 1900 Watt (± 10%), 240 Volt
  • Mounting threads on the bottom of the assembly
  • Material: 304 Stainless Steel

DRAWINGS

QUALITY

BCE Engineering & Quality Assurance

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