BACKGROUND
Industrial & semiconductor applications require high heat in a centralized location. BCE designed a heater platen with the goal of 900°C operation, fast ramp & soak of at least 800°C. When tested in our BCE Lab in Hayward California, we were able to push this heater further and achieved upwards of 1,050°C.
Ramp Time:
- Test#1 23°C to 800°C, 29 Min. (without Insulation)
- Test#2 23°C to 800°C, 13 Min. (with 2" Insulation)
- Test#3 23°C to 900°C, 17 Min. (with 2" Insulation)
- Test#4 23°C to 950°C, 18 Min. (with 2" Insulation)
- Test#5 23°C to 1,000°C, 19 Min. (with 2" Insulation)
Temperature Uniformity:
After the heater stabilized from 800°C to 950°C, the surface thermocouple on the edge to the internal thermocouple (approximately 180° away), there was a 1% to 2% delta.
Scope:
- Material: 304 Stainless Steel with Inconel Heat Source
- Stainless Steel CF or KF flanges of various sizes, with heat sink near heater outlet
- 200mm ∅ x 0.50" Thick
- Vacuum, HE Leak Test available
- 700VDC, Hi-pot, 1mA current leakage
- 5mΩ @ 500VDC prior to shipping
OUTCOME
Ramped heater from 23°C to 1,000°C in 19 min. under 2" thick ceramic fiber insulation. The heater was held at this temperature for 1 hour, and it intermittently hit 1,050°C.
The video below (coming soon) shows a test in atmosphere with no insulation which is less efficient but more interesting to look at.
BCE does not recommend operation above 900°C as this can drastically impact the life of the assembly. Furthermore, high-temperature operations should be in a vacuum/oxygen-free environment, and use of insulation is advised.
VIDEO
DRAWINGS
QUALITY
BCE Engineering & Quality Assurance
BCE engineers provide decades of experience in design and development, delivering a wealth of empirical data and experience. BCE welcomes your custom requirement and will design and deliver a part that meets your challenging needs.BCE is recognized for its commitment to quality and excellence by being certified in accordance with ISO 9001:2015.
