Vacuum Feedthroughs, Heating Elements, and Custom Process Heaters for Semiconductor, OEM Applications and University Research

Clean Flow Heater - Flange Style (Hi-Purity Gas)

Clean Flow Heater - Flange Style Hi-Purity Gas BCE11507

BACKGROUND

This project involved the heating of high-purity gas used in semiconductor processing. The challenge was to optimize the flow rate and watt density of tubular-style heaters to prevent overheating while maintaining a maximum temperature of 200°C. Additionally, it was crucial that the heating element be replaceable to ensure long-term usability.

SPECIFICATIONS

  • 300# Flange for Higher Pressure
  • Dimensions:: 4.5" Ø x 65" overall length
  • Outlet temperature: ~392°F (200°C)
  • Flow rate: 83 GPM
  • Flow configuration: Perpendicular, with (2) 1" NPT, 316 stainless steel inlet and outlet fittings
  • Pressure tested to 90 PSI assembled
  • Passed all electrical tests: 2 M-Ohm sheath to case insulation resistance, Hi-pot 1600VDC @ 1mA for 2 seconds, 500VDC M-Ohm insulation resistance test
  • Orientation: Can be installed in either horizontal or vertical flow positions
  • Thermocouple: Replaceable Type "K" thermocouple, probe-style, made of 316 stainless steel, positioned within the flow medium
  • Power: 15 KW, 240 Volt, 3-phase
  • Material: 316 series stainless steel body with rod-style elements

OUTCOME

In-house testing at BCE in an air medium environment allowed us to ramp the outlet temperature up to approximately 200°C. Upon installation at the customer site, the heater met performance expectations, effectively allowing gas to flow through the heater assembly with minimal pressure loss.

DRAWINGS

QUALITY

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