Vacuum Feedthroughs, Heating Elements, and Custom Process Heaters for Semiconductor, OEM Applications and University Research

Two Zone 300mm Vacuum Heater Chuck Pedestal

Two Zone 300mm Vacuum Heater Chuck Pedestal

Features

  • Temperature ~650°C
  • Two Zones for better temperature uniformity compared to single zone
  • 325mm overall diameter (12.8")
  • CF 2.75 Vacuum Flange on the bottom, pedestal style
  • (4) Bottom Mounted Thermocouple Compression Style ports for replicable type "K" T/C's
  • Helium Leak rate of 1 x 10-9 cc/sec He on complete assembly
  • 2,274 Watt (± 10%), 240 Volt
  • Mounting threads on the bottom of the assembly
  • Material: 304 Stainless Steel
  • Order now, P/N ASBCE11345REVD

DRAWINGS

QUALITY

BCE Engineering & Quality Assurance

BCE engineers provide decades of experience in design and development, delivering a wealth of empirical data and experience. BCE welcomes your custom requirement and will design and deliver a part that meets your challenging needs.

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